Semiconductor Sensor 4-Wire Measurement for DMM6500

I would like to measure the 4-wire resistance of a semiconductor sensor. The challenge is that the device is sensitive and may break when supplied with >500mV. I would like to do measurements at 50mV - 100mV. I had trouble finding resources on how to set this up with the DMM6500.

Thanks for the help!

Application requires Dry Circuit Resistance capability. DMM6500 does not have this feature. If you are looking for this capability, the DMM75100 is capable.